Electron beam irradiation device and method of manufacturing an electron beam permeable window
AssigneeKabushiki Kaisha Toshiba
InventorsYoshiyasu Itoh, Yutaka Ishiwata, Masataka Tamura
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AssigneeKabushiki Kaisha Toshiba
InventorsYoshiyasu Itoh, Yutaka Ishiwata, Masataka Tamura
Estimating the term…
This invention provides an electron beam irradiation device employing a material containing a Ti-A1 intermetallic composite as the material of an electron beam permeable window for allowing passage to the outside of a chamber of an electron beam generated in the chamber. Also, this invention provides a method of manufacturing an electron beam permeable window containing a Ti-A1 intermetallic composite by manufacturing a window-frame mounted titanium foil by fixing titanium foil between an outer window frame and an inner window frame of an electron beam permeable window, coating this with aluminium and titanium by converting aluminium and titanium to a metallic vapor state and subjecting this to thermal diffusion treatment.
Method of manufacturing an electron beam permeable window for allowing passage of thermions generated inside a chamber maintained under vacuum conditions to outside this chamber, comprising the following steps:
Method of manufacturing an electron beam permeable window for allowing passage of thermions generated inside a chamber maintained under vacuum conditions to outside this chamber, comprising the following steps:
An electron beam irradiating device for performing welding or heat treatment by irradiating a workpiece arranged outside a chamber, the interior of the chamber being maintained in a vacuum condition, with thermions being generated inside the chamber and which permeate to the outside of the chamber, the device comprising:
An electron beam irradiating device for performing welding or heat treatment by irradiating a workpiece arranged outside a chamber, the interior of the chamber being maintained in a vacuum condition, with thermions being generated inside the chamber and which permeate to the outside of the chamber, the device comprising:
Dependencies are inferred from the claim text.