Method for decolorizing purification of halogenated silane
AssigneeShin-Etsu Chemical Co., Ltd.
InventorsIsao Watanuki, Hiroshi Tsumura, Nobuhiko Kodana, Kazushi Satoh, Masanori Fukuhira, Hidehiko Aonuma
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Abstract
A simple but very effective and reliable method is proposed for the decolorizing purification of a halogenated silane compound, e.g., methyl trichlorosilane, colored by containing a very small amount of heavy metal impurities such as iron. The method comprises: contacting the halogenated silane compound with a small amount of a cationic surface active agent which is solid and insoluble in the silane such as a quaternary ammonium salt, e.g., trimethyl octadecyl ammonium chloride, for 2 to 240 minutes; and then separating the silane compound from the cationic surface active agent.
Claims11
A method for the decolorizing purification of a halogenated silane compound, which is liquid at room temperature, represented by the formula R.sup.1.sub.4-a SiX.sub.a, in which X is an atom of halogen, R.sup.1 is a hydrogen atom or a monovalent hydrocarbon group and the subscript a is 1, 2, 3 or 4, which method comprises the:
- (a) bringing the halogenated silane compound into contact with a cationic surface active agent which is solid at room temperature and insoluble in the halogenated silane compound;
- and
- (b) separating the halogenated silane compound from the cationic surface active agent.
Dependencies are inferred from the claim text.