Arrangement for measuring the light radiation of a plasma
AssigneeLeybold Aktiengesellschaft
InventorThomas Martens
Life of this patent
Estimating the term…
Abstract
The invention relates to an arrangement for measuring the light radiation of a plasma with sputter cathodes. Herein a light-sensitive sensor (15) is acted upon by the light from an optical fiber or from a bundle of optical fibers (14) which is (are) guided through an opening (13) of the sputter cathode (8). In this way the light intensity of the sputter plasma in the region of the sputtering crater of a target (9) can be measured. Moreover, it is possible to measure in simple manner the light intensities of several regions of the plasma.
Claims13
Arrangement for measuring the light radiation of a plasma which is generated with the aid of at least one electrode comprising:
- a light-sensitive sensor which is acted upon by a luminance proportional to luminance of the plasma, an electrode (8) provided with a bore (13), an end of an optical fiber (14) being disposed in the bore 13, another end of the optical fiber being guided to the light-sensitive sensor (15), a target (9) with a sputtering crater (29) and being disposed on the electrode (8) and having a bore aligned with the bore 13 of the electrode (8), the bore of the target being disposed between the sputtering crater (29) and a site of the target (9) into which a magnetic field enters or from which it exits and the bore of the target being no larger than a dark zone.
Dependencies are inferred from the claim text.