Method for diffusion patterning
AssigneeE. I. Du Pont de Nemours and Company
InventorsJohn J. Felten, Sheau-Hwa Ma
Life of this patent
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Abstract
Method for patterning organic polymer layers comprising the sequential steps: A. Applying to a substrate an unpatterned layer of acidic polymer dissolved in a plasticizer, B. Applying to the unpatterned layer a second patterned layer which is a liquid solution of organic base dissolved in a volatile solvent; C. Heating the patterned layer to effect removal of the volatile solvent from the layer and diffusion of the second layer plasticizer and organic base into the underlying areas of the acidic polymer layer; and D. Washing the layers with aqueous solution to effect solubilization of the acidic polymer underlying the patterned areas and removal therefrom of the solubilized polymer and plasticizers.
Claims9
A method for making patterns in organic polymer layers comprising the sequential steps:
- A. Applying to a substrate an unpatterned first layer comprising a solid dispersion of solid acidic organic polymer having an acid number of 20-600 in a first plasticizer;
- B. Applying to the unpatterned first layer a patterned second layer comprising a liquid solution of organic base and volatile solvent;
- C. Heating the patterned second layer to effect removal of the volatile solvent from the layer and diffusion of the organic base into the underlying areas of the first layer whereby the acidic polymer in the underlying areas of the first layer becomes solubilized by reaction with the organic base;
- and
- D. Washing the layers with aqueous solution having a pH of 5-8.5 to remove the solubilized acidic polymer from the patterned areas of the layers.
Dependencies are inferred from the claim text.