US 5,209,688 AGranted

Plasma display panel

AssigneeNarumi China Corporation

InventorsSusumu Nishigaki, Syozo Ohtomo, Rikiya Kamimura, Kazunari Tanaka

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Abstract

A plasma display panel is disclosed, which comprises a pair of insulating substrates with a predetermined space therebetween; a group of anode electrodes and a group of cathode electrodes formed on the inner side of each of the insulating substrates in such a manner that the groups of the electrodes are normal to each other; and barriers formed on the insulating substrate having the anode electrodes thereon by photolithography. Since the barriers are formed by photolithography using an ultraviolet-curable resin or positive-type resist, high precison patterns having a line width of 100 .mu.m or less and a line spacing of 100 .mu.m or less can be easily obtained and, thereby, a high resolution plasma display having a decreased picture element area and a wider discharge space can be obtained. When photolithography is used in the formation of the cathode electrodes, further high precision fine patterns can be obtained and further finely detailed pitch of picture elements can be achieved.

Claims15

Dependent claims

In a process for producing a plasma display panel comprising a pair of insulating substrates with a predetermined space therebetween;

a group of anode electrodes and a group of cathode electrodes formed on an inner side of each of said insulating substrates in such a manner that said groups of anode and cathode electrodes are normal to each other;
and barriers formed on said insulating substrate which has said anode electrodes formed thereon, the improvement comprising said barriers being formed by a photolithography process using an ultraviolet-curable resin comprising the steps of:
(1) applying a slip comprising an ultraviolet-curable resin and ceramic powder for forming said barrier onto said insulating substrate or said insulating substrate having said electrodes, thereby forming a coating layer;
(2) exposing portions of said coating layer to ultraviolet light through a mask in such a pattern as to correspond to a pattern of said barriers, thereby curing said ultraviolet-curable resin;
(3) repeating steps (1) and (2) at least once and until the thickness of said coating layer reaches the desired thickness;
(4) developing the exposed portions of said coating layer and removing the unexposed portions to form said pattern of said barriers;
and
(5) firing said exposed portions to form said barriers, whereby the developing and firing steps are not performed until the coating has reached the desired thickness.

5 more elements

In a process for producing a plasma display panel comprising a pair of insulating substrates with a predetermined space therebetween;

a group of anode electrodes and a group of cathode electrodes formed on an inner side of each of said insulating substrates in such a manner that said groups of anode and cathode electrodes are normal to each other;
and barriers formed on said insulating substrate which has said anode electrodes formed thereon, the ratio of the half-width (line width at the half-height) to the base width of said barriers being in the range of 0.8 to 1.2, the improvement comprising said barriers being formed by a photolithography process using a positive-type resist comprising the steps of:
(1) forming a positive-type resist layer having a thickness equal to or greater than the thickness of said barriers to be formed on said insulating substrate on said insulating substrate having said electrodes;
(2) exposing portions of said positive-type resist layer to ultraviolet light through a mask in such a pattern as to correspond to a pattern of said barriers;
(3) developing and eluting the exposed portions of said resist layer to form opening portions corresponding to the pattern of said barriers;
(4) exposing the remaining portions of the resist layer to ultraviolet light to make said remaining portions soluble in a developing solution;
(5) filling an insulating paste comprising ceramic powder for forming said barriers in the opening portions;
(6) eluting said remaining portions of said resist layer with a developing solution;
and
(7) firing said insulating paste to form said barriers;
and wherein said cathode electrodes are formed by a photolithography process using an ultraviolet-curable resin, said cathode electrode forming process comprising the steps of:
(1) applying a conductive paste comprising an ultraviolet-curable resin and metal powder for forming said electrodes onto said insulating substrate, thereby forming a coating layer;
(2) exposing said coating layer to ultraviolet light through a mask in such a pattern as to correspond to a pattern of said electrodes;
(3) repeating steps (1) and (2) until the thickness of said coating layer becomes the desired thickness;
(4) developing the exposed portions of said coating layer and removing the unexposed portions to thereby form said pattern of said electrodes;
and
(5) firing said exposed portions to form said electrodes, whereby the developing and firing steps are not performed until the coating layer has reached the desired thickness.

14 more elements

Dependencies are inferred from the claim text.