Semiconductor handling device having a self-check function and method of self-checking a semiconductor handling device
AssigneeKabushiki Kaisha Toshiba
InventorsYuzo Chayamichi, Kenji Abe
Life of this patent
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Abstract
A semiconductor handling device having a self-check mechanism comprising a product placement area in which a plurality of products are placed, a standard sample holding area for holding a standard sample, a tester for testing a product or the standard sample, and checking the characteristic thereof, a transfer robot for transferring the product or the standard sample between the product area or the standard sample holding area and the tester, and controller for causing the tester to test the standard sample when a testing operation starts or when the tester continuously determines that products are articles of inferior quality.
Claims2
A handling device having a self-check mechanism, the handling device being adapted for determining whether a product is good or bad according to predetermined criteria, comprising:
- a first area for holding a plurality of products;
- a second area for holding a standard sample;
- tester means for testing a product;
- transfer means for transferring the product between the first area and the tester means, and for transferring the standard sample between the second area and the tester means;
- and
- means for causing the tester means to test the standard sample when a testing operation starts and when said tester means continuously determines that a predetermined number of products are of bad quality, and for disabling testing operations of said tester means when said tester means determines that said standard sample is of bad quality.
Dependencies are inferred from the claim text.