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US 5,209,119 AGranted
Microdevice for sensing a force
AssigneeRegents of the University of Minnesota
InventorsDennis L. Polla, Takashi Tamagawa
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Abstract
A microsensor or micromechanical device based upon the piezoelectric properties of thin film lead zirconate titanate (PZT) with a thickness of between 0.1 and 5 microns. The thin film PZT is sandwiched between first and second electrodes which are provided with electrical connection means for electrically connecting the electrodes to a voltage sensor or voltage source. The invention also relates to a method for making such microsensor or micromechanical device.
Claims10
A microdevice formed integral to an integrated circuit chip for sensing a force comprising:
- a lead zirconate titanate (PZT) piezoelectric thin film having a thickness between about 0.1 and 0.5 microns, said thin film presenting a surface upon which said force acts and being adapted for deflective movement in response to the application of said force;
- first and second electrodes positioned on opposite sides of said PZT thin film, each of said electrodes having an inner surface in operable contact with said PZT thin film and an outer surface defining an outer surface of said microdevice, the first and second electrodes comprising means for sensing the piezoelectric effects produced in the film by said deflective movement of said thin film;
- and
- electrical connection means for electrically connecting said first and second electrodes to a voltage sensor.
1 more element
Dependencies are inferred from the claim text.