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US 5,209,118 AGranted
Semiconductor transducer or actuator utilizing corrugated supports
AssigneeIC Sensors, Inc.
InventorJohn H. Jerman
Life of this patent
Estimating the term…
Abstract
A semiconductor transducer or actuator is disclosed. The transducer and actuator each include a deflecting member with corrugations producing increased vertical travel which is a linear function of applied force. An accurate and easily controlled method that is insensitive to front-to-back alignment is also disclosed for forming uniform corrugations of precise thickness; independent of the thickness of the deflecting member. The cross-sectional shape of the corrugations is not limited by the etching technique, so that any configuration thereof is enabled.
Claims7
A semiconductor device comprising:
- a diaphragm member including a centrally disposed substantially rigid planar semiconductor deflecting member surrounded by a plurality of grooves formed in said diaphragm member and separated by thin sections, and an outer nondeflecting support member.
Dependencies are inferred from the claim text.