Apparatus to clean solid surfaces using a cryogenic aerosol
AssigneesAir Products and Chemicals, Inc., International Business Machines Corporation
InventorsWayne T. McDermott, Jin J. Wu, Richard C. Ockovic
Life of this patent
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Abstract
The present invention is an apparatus for cleaning semi-conductor solid surfaces using a spray of frozen cryogen, such as argon, to impinge on the solid surface to remove contaminant particles. The apparatus includes an appropriate nozzle positioned in a housing designed for ultra clean conditions including sweep gas supply and evacuation conduits and a support table movably positioned within the housing to controllably convey the semi-conductor solid surface on a track under the spray of frozen cryogen emanating from the nozzle.
Claims22
An apparatus for cleaning undesired material from a solid surface using a projected spray of discrete substantially frozen cleaning particles which can vaporize after impingement on the solid surface, comprising:
- a) a generally closed housing in which a solid surface to be cleaned is accommodated and having entry means for introducing a solid surface into said housing;
- b) a nozzle situated in said housing so as to project a spray of discrete substantially frozen cleaning particles at said solid surface to be cleaned;
- c) means for supplying a fluid cleaning medium to said nozzle for generation of substantially frozen cleaning particles;
- d) means for removal from said housing of said undesired material cleaned from said solid surface;
- e) movable support means in said housing for supporting said solid surface to be cleaned and having means to controllably move said solid surface from said entry means to a position juxtaposed to said projected spray of said nozzle;
- and
- f) means for supplying a flush gas to said housing to control the atmosphere in said housing and to assist the removal of said undesired material cleaned from said solid surface wherein said housing has a chamber accommodating said nozzle with an opening juxtaposed to a chamber accommodating said support means and said chamber accommodating said nozzle includes flow baffles at said opening for controlling said spray of said cleaning particles.
An apparatus for cleaning undesired material from a solid surface using a projected spray of discrete substantially frozen cleaning particles which can vaporize after impingement on the solid surface, comprising:
- a) generally closed housing in which a solid surface to be cleaned is accommodated and having entry means for introducing a solid surface into said housing;
- b) a nozzle situated in said housing so as to project a spray of discrete substantially frozen cleaning particles at said solid surface to be cleaned;
- c) means for supplying a fluid cleaning medium to said nozzle for generation of substantially frozen cleaning particles;
- d) means for removal from said housing of said undesired material cleaned form said solid surface;
- e) movable support means in said housing for supporting said solid surface to be cleaned and having means to controllably move said solid surface from said entry means to a position juxtaposed to said projected spray of said nozzle;
- and
- f) means for supplying a flush gas to said housing to control the atmosphere in said housing and to assist the removal of said undesired material cleaned from said solid surface wherein said housing has a raised chamber accommodating said nozzle with an opening juxtaposed to a lower chamber accommodating said support means and said raised chamber includes flow baffles at said opening for controlling said spray of said cleaning particles.
Dependencies are inferred from the claim text.