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US 5,208,789 AGranted
Condenser microphones based on silicon with humidity resistant surface treatment
AssigneeLectret S. A.
InventorChung H. Ling
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Abstract
An condenser microphone element including a silicon core, a layer of silicon dioxide thereon, and a layer of tantalum pentoxide thereon.
Claims12
A condenser microphone element comprising
- a backplate including a silicon core and a dielectric layer thereon, said dielectric layer including a layer of silicon dioxide on said silicon core and a layer of tantalum pentoxide on said silicon dioxide layer to protect said silicon dioxide layer from humidity, said dielectric layer having a surface exposed to an air cavity, with said surface spaced from a movable electrode, wherein said movable electrode is a diaphragm of a microphone.
A condenser microphone comprising
- a backplate including a silicon core and a dielectric layer thereon, said dielectric layer including a layer of silicon dioxide on said silicon core and a layer of tantalum pentoxide on said silicon dioxide layer to protect said silicon dioxide layer from humidity, said dielectric layer having a surface exposed to an air cavity, and a movable electrode supported in spaced relationship with said backplate, wherein said movable electrode is a diaphragm of the microphone, and wherein said movable electrode defines said air cavity between said movable electrode and said dielectric layers.
Dependencies are inferred from the claim text.