Sensor for thermal mass flowmeters
OwnerKurt Eiermann, Dieter Link +5inventors
InventorsKurt Eiermann, Dieter Link, Martin Hohenstatt, Reiner Goebel, Juergen Schrode, Andreas Gabel, Andreas Hoehler
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Abstract
A sensor for thermal mass flowmeters is described herein. The sensor includes a plate-shaped, thin-film resistor and a cylindrical holder into which the resistor is fastened. In order to fasten the thin-film resistor in a mechanically stable manner, the end surface of the holder is provided with a pocket hole which closely matches the cross section of the thin-film resistor. The thin-film resistor is suitably inserted into this pocket hole and fastened therein with an adhesive agent.
Claims8
A sensor for a thermal mass flow meter, said sensor comprising:
- a plate-shaped thin-film resistor, a holder in the shape of a cylindrical rod, and a tube tightly enclosing the cylindrical rod, wherein the holder includes an electrically insulating material and is provided with capillary drillings for receiving conductors connected to the thin-film resistor;
- wherein a first end of the holder defines a pocket hole which is adapted to receive the thin film resistor;
- said pocket hole being defined by a slit extending across said first end of the holder and by the enclosing tube;
- wherein a narrow end portion of the thin-film resistor is inserted into the pocket hole, whereby approximately 10 to 60% of the length of the thin-film resistor is received therein;
- wherein an area between a wall of the pocket hole and the received end portion of the thin-film resistor is filled with an adhesive substance;
- and
- wherein said holder in the shape of the cylindrical rod further includes a tapered portion which prevents contact between the cylindrical rod and the tube enclosing the rod over at least the length of the tapered portion.
A sensor according to claim 15, wherein the electrically insulating material of the holder is chosen from the group of ceramic or glass.
A sensor for a thermal mass flow meter, said sensor comprising:
- a plate-shaped thin-film resistor, a holder in the shape of a cylindrical rod, and a tube tightly enclosing the cylindrical rod, wherein the holder includes an electrically insulating material and is provided with capillary drillings for receiving conductors connected to the thin-film resistor;
- wherein a first end of the holder defines a pocket hole which is adapted to receive the thin film resistor;
- said pocket hole being defined by a slit extending across said first end of the holder and by the enclosing tube;
- wherein a narrow end portion of the thin-film resistor is inserted into the pocket hole, whereby approximately 10 to 60% of the length of the thin-film resistor is received therein;
- wherein an area between a wall of the pocket hole and the received end portion of the thin-film resistor is filled with an adhesive substance;
- and
- wherein said holder in the shape of the cylindrical rod includes two separate cylindrical rod portions separated by a gap.
Dependencies are inferred from the claim text.