Heat processing apparatus
AssigneeTokyo Electron Sagami Limited
InventorsKatsushin Miyagi, Tomio Kimishima
Life of this patent
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Abstract
A heat processing apparatus comprises a heating furnace, a process tube located in the heating furnace and having an open bottom, a manifold connected to the open bottom of the process tube, a sealing member sandwiched between the process tube and the manifold to air-tightly seal the process tube, a fixing member for fixing the process tube to the manifold, a heat transmitting member made of metal and sandwiched between the fixing member and the process tube to radiate heat at that area of the process tube, which is opposed to the fixing member, to the fixing member by heat conduction, and a heat exchange conduit arranged in the fixing member and having a passage through which heat exchanging medium flows to cool the fixing member by heat exchange.
Claims15
A heat processing apparatus comprising:
- a heating furnace;
- a process tube located in the heating furnace and having an open bottom;
- a manifold connected to the open bottom of the process tube;
- a sealing member sandwiched between the process tube and the manifold to air-tightly seal the process tube;
- fixing means for fixing the process tube to the manifold;
- heat transmitting means made of metal and sandwiched between the fixing means and the process tube to radiate heat at that area of the process tube, which is opposed to the fixing means, to the fixing means by heat conduction;
- and
- heat exchange means arranged in the fixing means and having a passage through which heat exchanging medium flows to cool the fixing means by heat exchange.
A heat processing apparatus comprising:
- a heating furnace;
- a process tube located in the heating furnace and having an open bottom;
- a manifold connected to the open bottom of the process tube;
- a sealing member sandwiched between the process tube and the manifold to air-tightly seal the process tube;
- fixing means for fixing the process tube to the manifold;
- and
- light radiation shielding means located inside and adjacent to the sealing member and projected upward from the top of the manifold to shield light radiated from the heating furnace to the sealing member.
A heat processing apparatus comprising:
- a heating furnace;
- a process tube located in the heating furnace and having an open bottom;
- a manifold connected to the open bottom of the process tube;
- a sealing member sandwiched between the process tube and the manifold to air-tightly seal the process tube;
- fixing means for fixing the process tube to the manifold;
- a gas passage formed in the fixing means to allow gas to pass through it;
- and
- a gas jetting outlet communicated with the gas passage to jet gas against that area of the process tube which is opposed to the fixing means.
Dependencies are inferred from the claim text.