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US 5,207,069 AGranted
Cryostat vacuum chamber
AssigneesHoriba, Ltd., Iwatani International Corporation
InventorsKoichiro Matsuda, Toshiya Itoh, Shoichiro Togitani, Etsuji Kawaguchi
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Abstract
In a cryostat vacuum chamber encompassing a refrigerator and a sample table cooled by the refrigerator, a heater is provided for controlling a temperature of the sample table, and the refrigerator is also provided with separate heaters.
Claims1
A method to avoid dewing during pressurization of a vacuum chamber having a sample table, at least one refrigeration stage supporting the table, and heaters for controlling temperature of the stage or table, each stage or table having its own respective heater, the method comprising the steps of:
- selecting an appointed temperature at which the vacuum chamber may be opened without dewing being caused on the stages and table;
- heating the table to the appointed temperature;
- heating each stage to the appointed temperature;
- making the heating of each stage and the table coincide with a predetermined speed of heating;
- and
- opening the vacuum chamber only after the table and each stage has reached the appointed temperature.
3 more elements
Dependencies are inferred from the claim text.