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AssigneeAT&T Bell Laboratories
InventorsDennis G. Deppe, Niloy K. Dutta, Erdmann F. Schubert, Li-Wei Tu, George J. Zydzik
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This invention embodies a Vertical Cavity Surface Emitting Laser with a top mirror comprising at least one pair of quarterwave layers, each pair consisting of a low index of refraction layer and a high index of refraction layer, the high index of refraction layer being a semiconductor chosen from GaP and ZnS and the low index of refraction layer being chosen from borosilicate glass (BSG) CaF.sub.2,MgF.sub.2 and NaF. Especially useful in vertical cavity surface emitting lasers are mirrors formed by a stack of a plurality of pairs of GaP/BSG or ZnS/CdF.sub.2. Such mirrors have a high reflectivity characteristics required for an efficient operation of the laser. The GaP/BSG or ZnS/CaF.sub.2 mirror structure represents a considerable improvement over previous designs for VCSELs in terms of ultimate reflectivity, low loss, and post growth processing compatibility.
An optical device comprising a semiconductor material selected from the group consisting of III-V and II-VI semiconductors, comprising a lasing cavity and top and bottom metal electrodes for applying electric field to the lasing cavity, said lasing cavity comprises a bottom mirror, a bottom confining region, an active region, a top confining region and a top mirror, said top mirror comprising a plurality of pairs of quarterwave layers, each pair of layers consisting of a low index layer and a high index layer arranged in an alternating sequence beginning with the low index layer, wherein said high index layer is a semiconductor selected from the group consisting of GaP and ZnS, and said low index layer is of a material chosen from the group of materials selected from borosilicate glass (BSG), CaF.sub.2,MgF.sub.2 and NaF.
Dependencies are inferred from the claim text.