Isothermal capacitance transient spectroscopy method and apparatus
AssigneeHoriba, Ltd.
InventorIssei Yokoyama
Life of this patent
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Abstract
A method and apparatus of determining the amount of impurities in an object with isothermal capacitance transient spectroscopy (ICTS) includes maintaining the object at a constant temperature while applying a predetermined voltage pulse to the object at predetermined test locations. The capacitance is measured over a predetermined time period, and the measured capacitance is processed to determine the amount of impurities in accordance with a differential coefficient obtained by differentiating the following equation used as the ICTS spectrum: ##EQU1## wherein C is the capacitance and t is the time period.
Claims8
A method of determining the amount of impurities in an object with isothermal capacitance transient spectroscopy (ICTS), comprising the steps of:
- maintaining the object at a constant temperature;
- applying a predetermined voltage pulse to the object at predetermined test locations;
- measuring the capacitance over a predetermined time period, and
- processing the measured capacitance to determine the amount of impurities in accordance with a differential coefficient obtained by differentiating the following equation used as the ICTS spectrum:
- ##EQU18## wherein C is the capacitance and t is the time period.
A method of determining the amount of impurities in an object with isothermal capacitance transient spectroscopy (ICTS), comprising the steps of:
- maintaining the object at a constant temperature;
- applying a predetermined voltage pulse to the object at predetermined test locations;
- measuring the capacitance over a predetermined time period, and
- processing the measured capacitance to determine the amount of impurities in accordance with a differential coefficient obtained by differentiating the following equation used as the ICTS spectrum:
- ##EQU19## wherein C is the capacitance and t is the time period.
A method of determining the amount of impurities in an object with isothermal capacitance transient spectroscopy (ICTS), comprising the steps of:
- maintaining the object at a constant temperature;
- applying a predetermined voltage pulse to the object at predetermined test locations;
- measuring the capacitance over a predetermined time period, and
- processing the measured capacitance to determine the amount of impurities in accordance with a differential coefficient obtained by differentiating the following equation used as the ICTS spectrum:
- ##EQU20## wherein C is the capacitance and t is the time period.
A method of determining the amount of impurities in an object with isothermal capacitance transient spectroscopy (ICTS), comprising the steps of:
- maintaining the object at a constant temperature;
- applying a predetermined voltage pulse to the object at predetermined test locations;
- measuring the capacitance over a predetermined time period, and
- processing the measured capacitance to determine the amount of impurities in accordance with a differential coefficient obtained by differentiating the following equation used as the ICTS spectrum:
- ##EQU21## wherein C is the capacitance and t is the time period.
An improved apparatus for determining the amount of impurities in an object with isothermal capacitance transient spectroscopy (ICTS), comprising:
- means for maintaining the object at a constant temperature;
- means for applying a predetermined voltage pulse to the object at predetermined test locations;
- means for measuring the capacitance over a predetermined time period, and
- means for processing the measured capacitance to determine the amount of impurities in accordance with a differential coefficient obtained by differentiating the following equation used as the ICTS spectrum:
- ##EQU22## wherein C is the capacitance and t is the time period.
An improved apparatus for determining the amount of impurities in an object with isothermal capacitance transient spectroscopy (ICTS), comprising:
- means for maintaining the object at a constant temperature;
- means for applying a predetermined voltage pulse to the object at predetermined test locations;
- means for measuring the capacitance over a predetermined time period, and
- means for processing the measured capacitance to determine the amount of impurities in accordance with a differential coefficient obtained by differentiating the following equation used as the ICTS spectrum:
- ##EQU23## wherein C is the capacitance and t is the time period.
An improved apparatus for determining the amount of impurities in an object with isothermal capacitance transient spectroscopy (ICTS), comprising:
- means for maintaining the object at a constant temperature;
- means for applying a predetermined voltage pulse to the object at predetermined test locations;
- means for measuring the capacitance over a predetermined time period, and
- means for processing the measured capacitance to determine the amount of impurities in accordance with a differential coefficient obtained by differentiating the following equation used as the ICTS spectrum:
- ##EQU24## wherein C is the capacitance and t is the time period.
An improved apparatus for determining the amount of impurities in an object with isothermal capacitance transient spectroscopy (ICTS), comprising:
- means for maintaining the object at a constant temperature;
- means for applying a predetermined voltage pulse to the object at predetermined test locations;
- means for measuring the capacitance over a predetermined time period, and
- means for processing the measured capacitance to determine the amount of impurities in accordance with a differential coefficient obtained by differentiating the following equation used as the ICTS spectrum:
- ##EQU25## wherein C is the capacitance and t is time period.
Dependencies are inferred from the claim text.