Apparatus and process for the non-destructive measurement of the ohmic resistance of a thin layer using eddy currents
AssigneeLeybold Aktiengesellschaft
InventorGernot Thorn
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AssigneeLeybold Aktiengesellschaft
InventorGernot Thorn
Estimating the term…
The invention concerns apparatus and a process for the non-destructive measurement of the ohmic resistance of thin layers according to the eddy-current principle. Here an inductor (2) is fed with a high frequency voltage (U.sub.osz) and the magnetic field of this inductor (2) is directed at the thin layer to be measured, whereby an eddy current flows in this layer the magnetic field of which weakens the magnetic field of the inductor (2). The inductor (2) is here part of an oscillating circuit (3) which is held always at resonance by means of a phase-correcting arrangement (14). Under these resonance conditions the reactive values of the oscillating circuit (3) may be neglected so that the current flowing into the oscillating circuit (3) depends solely on the ohmic resistance of this oscillating circuit (3), which in turn is determined by the ohmic resistance of the layer to be measured.
An apparatus for the non-destructive measurement of the ohmic resistance of thin layers according to the Eddy Current Principle, wherein an inductor is fed with alternating current with the magnetic field of which produces an Eddy Current in the thin layers, the magnetic field of which opposes the original magnetic field of the inductor, and wherein the inductor with a capacitor forms an oscillating circuit (3) and a means for keeping the oscillating circuit always at resonance is provided, said means for keeping said oscillator always at resonance comprising a phase regulation means and further characterized in that the inductor (2) has a cover (37) and is so embedded in a roller (20) that a surface of the cover (37) is flushed with the surface of the roller (20), while the thin layer (1) to be measured is displaceable on a carrier foil (21) over the roller (20), a means for maintaining the thin layer at a constant distance from aid inductor is provided, an amplifier (8) is provided to amplify the current (i.sub.1) flowing to the oscillating circuit (3), a voltage-to-current converter (57) is connected in series with the amplifier (8) and the gain of the amplifier (8) is stepwise switchable via several resistors (52-55).
An apparatus for the non-destructive measurement of the ohmic resistance of thin layers according to the Eddy Current Principle, wherein an inductor is fed with alternating current with the magnetic field of which produces an Eddy Current in the thin layers, the magnetic field of which opposes the original magnetic field of the inductor, and wherein the inductor with a capacitor forms an oscillating circuit (3) and a means for keeping the oscillating circuit always at resonance is provided, said means for keeping said oscillator always at resonance comprising a phase regulation means and further characterized in that the inductor (2) has a cover (37) and is so embedded in a roller (20) that a surface of the cover (37) is flushed with the surface of the roller (20), while the thin layer (1) to be measured is displaceable on a carrier foil (21) over the roller (20), a means for maintaining the thin layer at a constant distance from said inductor is provided and two memory means are provided of which one memory means stores a zero signal and the other memory means stores a measurement signal, and that the difference between the two signals serves as a measurement of the resistance of the thin layer (1) to be measured.
An apparatus for the non-destructive measurement of the ohmic resistance of thin layers according to the Eddy Current Principle, wherein an inductor is fed with alternating current with the magnetic field of which produces an Eddy Current in the thin layers, the magnetic field of which opposes the original magnetic field of the inductor, and wherein the inductor with a capacitor forms an oscillating circuit (3) and a means for keeping the oscillating circuit always at resonance is provided, said means for keeping said oscillator always at resonance comprising a phase regulation means and further characterized in that the inductor (2) has a cover (37) and is so embedded in a roller (20) that a surface of the cover (37) is flushed with the surface of the roller (20), while the thin layer (1) to be measured is displaceable on a carrier foil (21) over the roller (20), a means for maintaining the thin layer at a constant distance from said inductor is provided, a resistor of a known value which is selectively connectable to the oscillating circuit (3) for calibrating said apparatus is provided, a position sensor is provided and calibration takes place when the position sensor delivers a zero signal.
An apparatus for non-destructive measurement of the ohmic resistance of thin layers according to the eddy current-principle, said apparatus comprising:
A non-destructive process for measuring the ohmic resistance of thin layers utilizing eddy currents, said process comprising the steps of:
An apparatus for the non-destructive measurement of the ohmic resistance of a thin layer, comprising:
Dependencies are inferred from the claim text.