Method for fabricating oxide superconducting wires by laser ablation
AssigneeSumitomo Electric Industries, Ltd.
InventorNoriyuki Yoshida
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Abstract
Disclosed herein is a method of and an apparatus for fabricating an oxide superconducting wire which comprises a tape-type long base material and an oxide superconducting film formed thereon. The oxide superconducting film is formed by laser ablation of applying a laser beam (2) onto a target (4) while translating a long base material (6) along its longitudinal direction and depositing atoms and/or molecules scattered from the target (4) on the base material (6).
Claims7
A method of fabricating an oxide superconducting wire using laser ablation of applying a laser beam onto a target containing components of an oxide superconductive material and depositing particles thereby scattered from said target on a heated long base material, said method comprising the steps of:
- arranging a mask between said target and said long base material for limiting a film forming region;
- feeding said long base material along its longitudinal direction to be passed through a film forming station provided therein with said target;
- applying said laser beam onto said target thereby scattering particles from said target by laser ablation under an oxygen pressure of at least 300 mTorr;
- and
- depositing said particles on said limited film forming region of said long base material for forming an oxide superconducting film.
Dependencies are inferred from the claim text.