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US 5,206,117 AGranted
Photosensitive polyamic alkyl ester composition and process for its use
OwnerJeffrey W. Labadie, Dennis R. McKean +2inventors
InventorsJeffrey W. Labadie, Dennis R. McKean, Willi Volksen, Gregory M. Wallraff
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Abstract
The present invention relates to photosensitive negative and positive tone compositions for imagewise deposition of polyimide on a substrate.
Claims3
A process for generating a negative tone image of polyimide on a substrate comprising the steps of:
- (a) coating the substrate with a film comprising polyamic alkyl ester and a photosensitive base generator;
- (b) imagewise exposing the film to radiation;
- and (c) developing the image.
Dependencies are inferred from the claim text.