Binders soluble in aqueous alkali and containing silanyl groups in the side chain for a photosensitive mixture
AssigneeHoechst Aktiengesellschaft
InventorsPeter Wilharm, Gerhard Buhr, Juergen Fuchs
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AssigneeHoechst Aktiengesellschaft
InventorsPeter Wilharm, Gerhard Buhr, Juergen Fuchs
Estimating the term…
A silylated polymeric binder, which is soluble or swellable in alkali, bears a plurality of at least one of aliphatic and aromatic hydroxyl groups, at least a portion of which are derivatized by units of the formulae I and II: [(A--B.sub.n).sub.m C]--[(D.sub.o E.sub.p)BC].sub.u (I) and [(D.sub.o E.sub.p)BC].sub.v (II) which are side chains of the polymeric binder, wherein A denotes a silanyl group containing at least 2 silicon atoms in total linked to each other, but not more than 3 silicon atoms linked to each other in an unbranched chain of silicon atoms; B denotes a bridging group; C denotes a functional group which has formed a covalent bond with an aromatic, aliphatic, or cycloaliphatic hydroxyl group of the binder, the group D, or the group E; D denotes a grafted monohydric or polyhydric aliphatic alcohol; E denotes a grafted monohydric or polyhydric aromatic alcohol; n denotes 0 or 1; m denotes 1 or 2; and o, p, u and v each denote 0 or 1. Photosensitive mixtures containing this binder are resistant to plasma etching, stable on storage and have a high thermal stability.
A photosensitive mixture comprising:
Dependencies are inferred from the claim text.