Negative-working radiation-sensitive mixtures containing cyclized rubber polymer and contrast enhancing azo dye
AssigneeOCG Microelectronic Materials, Inc.
InventorsStephen F. Marcotte, Jr., John Griffiths
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AssigneeOCG Microelectronic Materials, Inc.
InventorsStephen F. Marcotte, Jr., John Griffiths
Estimating the term…
A negative-working, radiation-sensitive composition comprising an admixture in a solvent of: (a) at least one cyclized rubber polymer, (b) at least one photoactive compound, and (c) an effective contrast enhancing amount of at least one rubber-soluble azo dye containing a reactive acrylate or methacrylate group of formula (I): ##STR1## wherein Q is a reactive group of the structure ##STR2## wherein Y is either H or CH.sub.3 ; wherein R.sub.1 is either H, CH.sub.3, C.sub.2 H.sub.5, CH.sub.2 CH.sub.2 CN, CH CH.sub.2 OH or Q; wherein R.sub.2 is either H, CH.sub.3, OCH.sub.3, or NHCOCH.sub.3 ; wherein R.sub.3 is either H, OCH.sub.3 or OC.sub.2 H.sub.5 ; and wherein X is selected from the group consisting of an unsubstituted or a substituted benzene, thiazole, thiophene, benzothiazole, benzoisothiazole, thiadiazole, and pyrazole moiety having, if substituted, 1-3 substituent groups selected from cyano, nitro, acetyl, and halogen groups; the amount of said cyclized rubber being about 90% to 99.5% by weight, the amount of said photoactive component being about 0.5% to about 10% by weight, based on the total solids content of said radiation-sensitive composition.
A negative-working, radiation-sensitive composition comprising an admixture in a solvent of:
A coated substrate comprising a substrate coated with a film of a negative-working, radiation-sensitive composition comprising an admixture of:
Dependencies are inferred from the claim text.