Method to fabricate frequency doubler devices
AssigneeMatsushita Electric Industrial Co., Ltd.
InventorsKazuhisa Yamamoto, Kunihiko Takeshige, Tetsuo Taniuchi
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Abstract
A method to fabricate nonlinear optical frequency doubler devices comprised of a process to form periodic tantalum masks on a LiNb.sub.x Ta.sub.1-x O.sub.3 (wherein 0.ltoreq.x.ltoreq.1) crystal substrate, a process to form periodic proton exchanged regions by applying a phosphoric acid treatment, and a process to form an optical waveguide on the surface of said crystal. According to this fabrication method of the present invention, deeper domain-inverted regions can be formed on said crystal surface, and by this, a fundamental wave can be transformed into a harmonic wave at a high efficiency.
Claims10
A fabricating method of an optical frequency doubler device comprising the steps of:
- forming periodically disposed protection masks on a nonlinear optical crystal substrate;
- forming domain-inverted regions by heat treatment after applying a proton exchange process on said non-linear optical crystal substrate;
- and forming an optical waveguide on said nonlinear optical crystal substrate surface.
Dependencies are inferred from the claim text.