Method and apparatus for recovering substance adhered to object to be processed
AssigneeOgihara Technical Center Co., Ltd.
InventorYoshiaki Yokoyama
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AssigneeOgihara Technical Center Co., Ltd.
InventorYoshiaki Yokoyama
Estimating the term…
A method for recovering substance such as zincing or the like adhered to the surface of an object to be processed, by causing such materials to be evaporated in a vacuum. In this method, the object to the processed is placed in a furnace provided with heating means; the temperature within the furnace is elevated up to a predetermined level with the aid of an oxidizing gas atmosphere; the pressure in the furnace is reduced so that the quantity of the oxidizing gas is reduced to be below the explosion limit; and vaccum or a reducing gas atmosphere is fed into the furnace to reduce the oxidization of the object to be processed. Thereafter, the interior of the furnace is evacuated while being maintained under a predetermined evaporation temperature condition; and the substance evaporated from the object to be processed is passed to recovery means provided in communication with the furnace, so that the substance thus evaporated is condensed in the recovery means and recovered therefrom.
A method of cleaning a substance from a surface of a solid object to be processed and recovering the substance, which comprises the steps of placing the object to be processed in a closed atmosphere, and heating and evacuating the closed atmosphere to increase temperature therein after reducing pressure in the closed atmosphere, thereby evaporating and then recovering the substance comprising at least one member selected from the group consisting of liquid and solid adhered to the object to be processed, through variations in the temperature and pressure in the closed atmosphere.
An apparatus for cleaning the surface of a solid object to be processed, which comprises a closed container having a closed atmosphere in which the object to be processed is placed;
A method of recovering substance adhered to the surface of an object to be processed, by causing such substance to be evaporated in a vacuum, which comprises placing an object to the processed in a furnace provided with heating means;
A method of recovering substance adhered to the surface of an object to be processed, by causing such substance to be evaporated in a vacuum, wherein the temperature in a furnace in which the object to be processed is placed, is increased by a method selected from the group consisting of under a vacuum condition and with a reducing gas;
An apparatus for recovering substance such as zincing or the like adhered to the surface of an object to be processed, by causing such substance to be evaporated in a vacuum, comprising a closed chamber provided with means for elevating the temperature in a furnace;
Dependencies are inferred from the claim text.