Degassing apparatus
AssigneeUniflows Co., Ltd.
InventorHideyuki Morikawa
Life of this patent
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Abstract
A degassing apparatus in which a tube made of permeable film is laid in a vacuum chamber which is decompressed and controlled by a vacuum pump, and a liquid flowing in the tube is degassed by causing gas to permeate through the wall of the tube. The degassing apparatus comprises a valve for opening the vacuum chamber toward the atmosphere and/or a permeable film which is placed between the vacuum chamber and the atmosphere and/or a valve for opening the vacuum pump to the atmosphere which is disposed between the primary valve and the primary cylinder of the vacuum pump. This degassing apparatus can be very small in size and can operate stably.
Claims2
A degassing apparatus in which a tube made of permeable film is laid in a vacuum chamber decompressed under control by a vacuum pump and a liquid flowing through said tube is degassed by causing gas to permeate the wall of said tube,
- characterized in that said vacuum pump can be exposed to the atmosphere by way of a valve disposed between a primary valve and a primary cylinder of said vacuum pump.
A degassing apparatus in which a tube made of permeable film is laid in a vacuum chamber decompressed under control by a vacuum pump, and a liquid flowing through said tube is degassed by causing gas to permeate the wall of said tube,
- characterized in that a valve is disposed so that said vacuum chamber is exposable to the atmosphere, said vacuum pump is exposed to the atmosphere by way of a valve disposed between a primary valve and a primary cylinder of said vacuum pump, and a permeable film is placed between said vacuum chamber and the atmosphere.
Dependencies are inferred from the claim text.