Pivoting air lock for a treatment chamber
AssigneeLeybold Aktiengesellschaft
InventorHerbert Naehring
Life of this patent
Estimating the term…
Abstract
In a pivoting air lock for the entry and/or exit of a substrate from one treatment chamber into an adjacent one or from atmospheric space into a chamber of lesser pressure, especially a slot air lock for a pass-through vacuum coating apparatus, with a flap-like valve plate (2) held in stationary bearings (11, 11a) and two closing motors (10, 10a) in active connection with the valve plate, the valve plate (2) is, with the interposition of two spring rods (5, 5a), linked to a valve beam (1) which in turn has two diametrically opposite journals (12, 12a) which are coupled for rotation with the shafts (18, 18a) of the motors (10, 10a), the shafts (18, 18a) of the motors (10, 10a) being brought in a pressure-proof manner through the wall (13, 13a) of the chamber (3).
Claims5
Air lock assembly for an opening in a wall of a treatment chamber, said air lock assembly comprising
- a valve beam arranged for pivotable movement about an axis of rotation from an open position to a closed position, said valve beam having a plurality of spaced apart first ribs extending transversely of said axis of rotation, each rib having a pair of first grooves therein,
- a valve plate extending parallel to said valve beam and pivotably connected thereto, said valve plate being arranged to close said opening when said valve beam is in the closed position, said valve plate having a plurality of spaced apart second ribs extending transversely of said axis of rotation, each rib having a pair of second grooves therein, and
- two lengths of resilient material extending parallel to said axis of rotation, each length engaging a respective groove in each first rib and a respective groove in each second rib, said length being fixed to said first ribs by first clamps, said lengths being fixed to said second ribs by second clamps.
Dependencies are inferred from the claim text.