Jig for clamp-positioning single crystal ingot
AssigneeShin-Etsu Handotai Co., Ltd.
InventorsHiroyuki Ibe, Tosihisa Nakata
Life of this patent
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Abstract
A jig is provided for accurately and easily positioning a single crystal ingot with respect to the clamp rotary shafts of a device for grinding the peripheral surface of the ingot. The jig includes male positioning fixtures 10L and 10R and female positioning fixtures 32L and 32R. In the male positioning fixtures, negative-pressure suction cups 105 made of an elastic or viscoelastic material and blocks 101 at the backs of the cups are integrally formed with each other. In the female positioning fixtures, holes 325 are formed at the ends of the clamp rotary shafts 30L and 30R of the grinding device. The male positioning fixtures are accommodated in the holes, and the blocks are fitted into the holes so as to be concentric with the clamp rotary shafts.
Claims4
A jig clamp-positioning a single crystal ingot having an uneven peripheral surface and two flat parallel ends each having a center, comprising:
- a pair of male positioning fixtures (10L, 10R) each having an elastic or viscoelastic cup (105) for suction attachment to the center of one of the ends of the single crystal ingot by pressing an open end of said cup against a flat end of the single crystal so as to make an interior of said cup airtight and attach to a flat end by negative pressure, each said cup having a block (101) fixed thereto at an opposite end to said open end, each said block being tapered and concentric with said cup;
- and
- a pair of female positioning fixtures (32L, 32R), each formed at an end of a pair of clamp rotary shafts (30L, 30R) of a device for grinding the peripheral surface of the single crystal ingot, each said female positioning fixture having a hole (325) for accommodating said male positioning fixture by removably fitting said block into said hole, said hole being concentric with said clamp rotary shaft, wherein at least one of said female positioning fixtures (32L, 32R) is linked with a respective said end of said clamp rotary shaft (30L, 30R) by pin (324) arranged perpendicular to the axis of said clamp rotary shaft such that said female positioning fixture is rotatable about said pin
- each said hole having a tapered wall with a degree of taper substantially the same as said block,
- said cup of each said male positioning fixture contacting an end of the ingot and each male positioning fixture being within said each hole when the single crystal ingot is clamped by said clamp rotary shafts.
Dependencies are inferred from the claim text.