X-ray microscope
AssigneeCanon Kabushiki Kaisha
InventorsMasami Hayashida, Yutaka Watanabe, Masahito Niibe, Takashi Iizuka, Yasuaki Fukuda
Life of this patent
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Abstract
A method and device for imaging an object illuminated by an X-ray beam, through a zone plate, is disclosed. A concave mirror with a multilayered film is disposed on a path of the X-ray beam to reflect the same and collect the same onto the object.
Claims47
A method of imaging an object illuminated by an X-ray beam, through a zone plate, comprising the steps of:
- disposing a concave mirror with a multilayered film in a path of the X-ray beam;
- reflecting the X-ray beam from the concave mirror with the multilayered film;
- and
- collecting the reflected X-ray beam onto the object.
An imaging system for imaging an object illuminated by an X-ray source on a detector, comprising:
- a concave mirror with a multilayered film, for reflecting X-rays from the X-ray source to collect them onto the object;
- and
- a zone plate for forming an image of the object irradiated with the X-rays.
An X-ray microscope, comprising:
- an X-ray source for supplying X-rays;
- a concave mirror with a multilayered film, for reflecting the X-rays and collecting them onto a sample;
- a zone plate for forming a magnified image of the sample irradiated with the X-rays;
- and
- a detector for detecting the formed image.
A method of imaging an object illuminated by an X-ray beam, through a zone plate, to detect an image of the object, comprising the steps of:
- disposing a concave mirror with a multilayered film in a path of the X-ray beam;
- reflecting the X-ray beam;
- reflecting the X-ray beam from the concave mirror with the multilayered film;
- and
- collecting the reflected X-ray beam onto the object.
A method of imaging an object illuminated by an X-ray beam, comprising the steps of:
- reflecting the X-ray beam on a multilayered film mirror;
- and
- collecting the reflected X-ray beam on the object;
- and
- imaging the object through a zone plate.
A method of detecting an image of an object illuminated by an X-ray beam comprising the steps of:
- reflecting the X-ray beam on a multilayered film mirror;
- collecting the reflected X-ray beam on the object;
- and
- imaging the object through a zone plate.
An apparatus for exposing a radiation sensitive material, comprising:
- an X-ray source for supplying X-rays;
- a concave mirror with an multilayered film, for reflecting the X-rays and for collecting them onto an object;
- and
- a zone plate for forming an image of the object, irradiated with the X-rays, on the radiation sensitive material for exposure thereof.
Dependencies are inferred from the claim text.