Ultraviolet light filter and filter system
AssigneeGeneral Electric Company
InventorRenato Guida
Life of this patent
Estimating the term…
Abstract
An ultraviolet light filter is provided by implanting an ultraviolet light absorbing chemical species into an ultraviolet light transmissive substrate. Two such filters having gradient distributions may be overlapped and shifted relative to each other to provide adjustable attenuation.
Claims26
A filter for reducing the intensity of ultraviolet light comprising:
- a substrate which is substantially transparent to ultraviolet light at least for wavelengths in the range of 193 nanometers to 248 nanometers inclusive;
- and
- a pattern of ultraviolet light absorbing chemical species distributed within said substrate.
A filter for reducing the intensity of ultraviolet light comprising:
- a substrate which is substantially transparent to ultraviolet light;
- and
- a pattern of ultraviolet light absorbing chemical species distributed within said substrate, the distribution pattern exhibiting elliptical symmetry.
A filter for reducing the intensity of ultraviolet light comprising:
- a substrate which is substantially transparent to ultraviolet light;
- and
- a pattern of ultraviolet light absorbing chemical species distributed within said substrate, the distribution pattern being Gaussian.
A system for adjusting the intensity of a beam of ultraviolet light, comprising:
- first and second substrates, each having a major surface, each having an ultraviolet light absorbing chemical species distributed therein with the distribution of that species being graded in a direction parallel to said major surface;
- said first and second substrates being disposed in series across the path of said ultraviolet light with their graded distributions oriented in opposed relation;
- means for shifting said substrates relative to each other to change the quantity of said ultraviolet light absorbing chemical species disposed in the path of said ultraviolet light.
A system for modifying the energy profile of a light beam comprising:
- a substrate which is substantially transparent to said light disposed in the path of said light;
- a pattern of chemical species distributed within said substrate which absorbs said light, said pattern having the symmetry of the energy profile of said beam, varying across said beam, and being inverse to the energy profile of said beam to provide a substantially flat energy profile for the central portion of the beam emerging from said substrate.
An annealed filter for reducing the intensity of ultraviolet light comprising a substrate substantially transparent to ultraviolet light and a pattern of ultraviolet light absorbing chemical species distributed therein;
- said filter having an ultraviolet light transmittance spectrum which is substantially stable even following transmission of a laser beam through the active portion of said substrate.
A filter for reducing the intensity of ultraviolet light comprising:
- a substrate which is substantially transparent to ultraviolet light;
- and
- a pattern of ultraviolet light absorbing chemical species distributed within said substrate, said chemical species being ion implanted therein.
Dependencies are inferred from the claim text.