High-frequency semiconductor device having emitter stabilizing resistor and method of manufacturing the same
AssigneeKabushiki Kaisha Toshiba
InventorsTomohiko Yamamoto, Kazuo Endou, Takashi Kimura
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AssigneeKabushiki Kaisha Toshiba
InventorsTomohiko Yamamoto, Kazuo Endou, Takashi Kimura
Estimating the term…
High-frequency transistors are formed on a semiconductor substrate. Each transistor includes an emitter having a fish-bone structure, a base formed to surround the emitter, and a base lead region connected to the base. A resistor layer having the same conductivity type as that of the base lead region, and an impurity concentration and a junction depth equal to those of the base lead region is formed in the substrate. An emitter electrode is connected to the emitter and the resistor layer. A portion of the emitter electrode connected to the resistor layer has an interdigital structure, and is connected to the resistor layer at two or more contact surface portions or an interdigital surface portion. An electrode on the wiring layer side is connected to the resistor layer. A portion of the electrode connected to the resistor layer has an interdigital structure which matches with the interdigital structure of the emitter electrode.
A high-frequency transistor including an emitter stabilizing resistor, comprising:
A semiconductor device comprising:
A semiconductor device comprising:
Dependencies are inferred from the claim text.