Projection exposure device

A projection exposure device in which an exposure light from a light source device is transmitted through a mask having a predetermined pattern formed therein and then an image of a mask pattern is focused by a projection lens on an exposure member held by a holding mechanism, the projection exposure device comprising:

• means for emitting an exposure light from the light source device along a horizontal optical axis;
• the mask, the projection lens and the exposure member being disposed on the horizontal optical axis;
• the holding mechanism holds the exposure member such that the exposure member is movable at least within a plane perpendicular to the horizontal optical axis;
• and
• the light source device includes:
• a truck independently movable in the direction of the horizontal optical axis;
• a light emitting source, mounted on the truck, for emitting an exposure light with a wavelength shorter than that of infrared light;
• an integrator, mounted on the truck, for making the light emitted from the light emitting source uniform;
• an optical axis changing means, mounted on the truck, for changing the optical path of the light emitted from the integrator into the direction of the horizontal optical axis;
• and
• a Fresnel lens, mounted on the truck, for projecting an illuminated optical image from the optical axis changing means into an entrance pupil of the projection lens.

In a projection exposure device in which an exposure light from a light source device is transmitted along a horizontal optical axis through a mask having a predetermined exposure pattern formed therein and supported by a mask holding mechanism and then an image of the exposure pattern is focused by a projection lens on an exposure member held by an exposure member holding mechanism so as to be movable at least in a plane orthogonal to the horizontal optical axis, the improvement in which the light source device comprises:

• a light emitting source mounted on a truck for emitting an exposure light of a wavelength shorter than that of infrared light, the truck being movable in a direction of the horizontal optical axis independently of an exposure device main body including the mask, the projection lens, and the exposure member holding mechanism;
• an integrator for making the light emitted from the light emitting source uniform;
• an optical axis changing means for changing an optical path of light exiting from the integrator;
• and
• converging means for collecting the light from the optical axis changing means and reflecting the same in the direction of the horizontal optical axis to thereby project the light into an entrance pupil of the projection lens.

In a projection exposure device in which an exposure light from a light source device is transmitted along a horizontal optical axis through a mask having a predetermined exposure pattern formed therein and an image of the exposure pattern is focused by a projection lens on an exposure member held by a holding mechanism, the exposure member being held by the holding mechanism so as to be movable at least in a plane orthogonal to the horizontal optical axis, the improvement comprising:

• at least a pair of alignment marks formed at symmetrical positions with respect to the horizontal optical axis on opposite sides of an area of the mask having the exposure pattern formed in the area;
• at least a pair of exposure member alignment marks formed on the exposure member, the pair of exposure member alignment marks respectively corresponding to the pair of mask alignment marks;
• an illumination mechanism for illuminating the exposure member alignment marks by light with which a resist is not sensitive and for illuminating the mask alignment marks through the projection lens by superposing the reflected light from the exposure member alignment marks;
• an alignment mark detection mechanism for detecting the relative positions of the mask alignment marks on which the reflected light is superposed by the illuminating mechanism and the exposure member alignment marks;
• and
• a mask holding mechanism, based on a relative position signal from the alignment mark detection mechanism, for moving the mask two-dimensionally with respect to the exposure member holding mechanism in a plane perpendicular to the horizontal optical axis.