Method of adjusting the size of the area scanned by a scanning probe
AssigneeDigital Instruments, Inc.
InventorsVirgil B. Elings, John A. Gurley
Life of this patent
Estimating the term…
Abstract
A method of adjusting the scan size of an instrument having piezoelectric scanners, such as a scanning probe microscope, including operating the instrument at a first scan size and adjusting the scan size of the instrument to a second scan size. The instrument is then precycled by scanning in each of x and y directions over substantially maximum excursions in each direction for a number of scan lines less than a complete scan of an area of the second scan size. The precycling settles the sensitivities of the piezoelectric scanners. The instrument is then operated at the second scan size to obtain data indicative of the surface of a scanned object.
Claims27
A method for changing the scan size from a first to a second scan size of an instrument having piezoelectric scanners for scanning a probe over a surface with x-direction and y-direction scan motions, comprising:
- operating said instrument at a first scan size;
- precycling said instrument by scanning said probe in said x and y directions at a scan length related to said second scan size for a number of scan lines but less than a number of scan lines in a full scan;
- and
- operating said instrument at said second scan size.
A method as recited in claim I, wherein said step of precycling comprises scanning said probe in each of said x and y directions for one forward and backward cycle.
A method for changing the scan size from a first to a second scan size of an instrument having piezoelectric scanners for scanning a probe over a surface with x-direction and y-direction scan motions, said y-direction scan motion being more slowly varying than said x-direction scan motion, comprising:
- operating said instrument at a first scan size;
- precycling said instrument by scanning said probe in said y direction at a scan length related to said second scan size for a number of scan lines but less than a number of scan lines in a full scan;
- and
- operating said instrument at said second scan size.
A method for changing the scan size from a first scan size to a second scan size of an instrument having piezoelectric scanners for scanning a probe over a surface with and perpendicular x-direction and y-direction scan motions, comprising:
- operating said instrument at a first scan size;
- precycling said instrument in a scanning motion for a plurality of scan lines less than a number of scan lines in a full scan, said x- and y-direction scanning motions being carried out simultaneously;
- and
- operating said instrument at said second scan size.
Dependencies are inferred from the claim text.