Crosslinked fluorinated poly(arylene ether)
AssigneeRaychem Corporation
InventorsFrank W. Mercer, Richard C. Sovish
Life of this patent
Estimating the term…
Abstract
Fluorinated poly(arylene ethers) having a repeat unit such as ##STR1## are useful as dielectric materials in multilayer interconnects in integrated circuit chips and multichip modules and as protective materials for chips.
Claims6
A crosslinked, fluorinated poly(arylene ether) produced by heating in air at a temperature between about 300.degree. and about 400.degree. C. a fluorinated poly(arylene ether) comprising a repeat unit of the structure ##STR18## wherein --W-- is ##STR19## wherein independently each --A is --CH.sub.2 CH.dbd.CH.sub.2 or --A is --F, --Cl, --Br, --CF.sub.3, --CH.sub.3, or --C.sub.6 H.sub.5 ;
- p is 0, 1, or 2;
- --Z-- is --C(CH.sub.3).sub.2 --, --C(CF.sub.3).sub.2 --, --O--, --S--, --SO.sub.2 --, --CO--, --P(C.sub.6 H.sub.5)--, C(CH.sub.3)(C.sub.6 H.sub.5), --C(C.sub.6 H.sub.5).sub.2 --, --(CF.sub.2).sub.1-6 --, or ##STR20## wherein --Y-- is --O-- or --Y-- is a direct bond;
- and m is 0, 1, or 2;
- independently each --X is --CH.sub.2 CH.dbd.CH.sub.2 or X is --H, --Cl, --Br, --CF.sub.3, --CH.sub.3, or --C.sub.6 H.sub.5 ;
- q is 0, 1, or 2;
- and n is 1 or 2;
- provided that when --Z-- is --C(CH.sub.3).sub.2 --, --S--, or --SO.sub.2 -- and m is 1, then p and q are not both 0.
A crosslinked fluorinated poly(arylene ether) produced by heating an intimate mixture of a fluorinated poly(arylene ether) and peroxydic compound, the fluorinated poly(arylene ether) comprising a repeat unit of the structure ##STR21## wherein --W-- is ##STR22## wherein independently each --A is --CH.sub.2 CH.dbd.CH.sub.2 or --A is --F, --Cl, --Br, --CF.sub.3, --CH.sub.3, or --C.sub.6 H.sub.5 ;
- p is 0, 1, or 2;
- --Z-- is --C(CH.sub.3).sub.2 --, --C(CF.sub.3).sub.2 --, --O--, --S--, --SO.sub.2 --, --CO--, --P(C.sub.6 H.sub.5)--, C(CH.sub.3)(C.sub.6 H.sub.5), --C(C.sub.6 H.sub.5).sub.2 --, --(CF.sub.2).sub.1-6 --, or ##STR23## wherein --Y-- is --O-- or --Y-- is a direct bond;
- and m is 0, 1, or 2;
- independently each --X is --CH.sub.2 CH.dbd.CH.sub.2 or X is --H, --Cl, --Br, --CF.sub.3, --CH.sub.3, or --C.sub.6 H.sub.5 ;
- q is 0, 1, or 2;
- and n is 1 or 2;
- provided that when --Z-- is --C(CH.sub.3).sub.2 --, --S--, or --SO.sub.2 -- and m is 1, then p and q are not both 0.
A method of crosslinking a fluorinated poly(arylene ether) comprising a repeat unit of the structure ##STR24## wherein --W-- is ##STR25## wherein independently each --A is --CH.sub.2 CH.dbd.CH.sub.2 or --A is --F, --Cl, --Br, --CF.sub.3, --CH.sub.3, or --C.sub.6 H.sub.5 ;
- p is 0, 1, or 2;
- --Z-- is --C(CH.sub.3).sub.2 --, --C(CF.sub.3).sub.2 --, --O--, --S--, --SO.sub.2 --, --CO--, --P(C.sub.6 H.sub.5)--, C(CH.sub.3)(C.sub.6 H.sub.5), --C(C.sub.6 H.sub.5).sub.2 --, --(CF.sub.2).sub.1-6 --, or ##STR26## wherein --Y-- is --O-- or --Y-- is a direct bond;
- and m is 0, 1, or 2;
- independently each --X is --CH.sub.2 CH.dbd.CH.sub.2 or X is --H, --Cl, --Br, --CF.sub.3, --CH.sub.3, or --C.sub.6 H.sub.5 ;
- q is 0, 1, or 2;
- and n is 1 or 2;
- provided that when --Z-- is --C(CH.sub.3).sub.2 --, --S--, or --SO.sub.2 -- and m is 1, then p and q are not both 0;
- which method comprises heating an intimate mixture of the fluorinated poly(arylene ether) and a peroxydic compound.
Dependencies are inferred from the claim text.