US 5,203,945 AGranted

Plasma processing apparatus having driving control section

AssigneeTokyo Electron Limited

InventorsIsahiro Hasegawa, Takashi Yokota

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Abstract

A plasma processing apparatus includes a plasma processing section and a control section for controlling an operation of a driving system of the processing section. The control section includes a CPU, arranged to be separated from the plasma processing section, for outputting a digital control signal to the driving system of the plasma processing section, a first converter, arranged on the CPU side, for converting a parallel signal from the CPU into a serial signal, a second converter, arranged on the processing section side, for converting the serial signal from the first converter into a parallel signal and outputting the parallel signal to the processing section, a cable for transmitting a serial signal between the first converter and the second converter, and a timing control circuit for controlling timings of transmission/reception signals of the first and second converters.

Claims15

Dependent claims

A plasma processing apparatus having a driving control section comprising:

a plasma processing section, having a driving system, for performing plasma processing;
and
a control section for controlling an operation of the driving system of said plasma processing section,
said control section having
control means, arranged to be separated from said plasma processing section, for outputting a digital control signal to the driving system of said plasma processing section,
first converting means, arranged on a side of said control means, for converting a parallel signal from said control means into a serial signal,
second converting means, arranged on a side of said processing section, for converting the serial signal from said first converting means into a parallel signal and outputting the parallel signal to said processing section,
transmitting means for transmitting a serial signal between said first converting means and said second converting means, and
a timing control circuit for controlling timings of transmission/reception signals for said first and second converting means.

6 more elements

Dependencies are inferred from the claim text.