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US 5,203,929 AGranted
Method of producing amorphous magnetic film
AssigneeToyota Jidosha Kabushiki Kaisha
InventorsNoboru Takayanagi, Kazuhiro Akihama
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Abstract
An amorphous magnetic film is produced by irradiating laser beams onto a magnetic metallic target and depositing an evaporated material on a substrate. During or after the evaporation process, the film formed on the substrate is annealed at a temperature lower than a crystallization temperature. The annealing process enables elimination of stresses from the film, thereby improving soft magnetic properties.
Claims4
A method of producing an amorphous magnetic film, comprising:
- (a) disposing a target consisting of a magnetic metal and a substrate in a confronting manner in a high vacuum chamber;
- (b) heating said substrate to a temperature below a crystallization temperature of a film to be produced;
- (c) irradiating a laser beam to said target so as to evaporate a target material;
- and
- (c) depositing the evaporated target material on said heated substrate so as to produce a thin film on said substrate.
2 more elements
Dependencies are inferred from the claim text.