Method of and apparatus for synthesizing diamondlike thin film

An apparatus for synthesizing a diamondlike thin film on a substrate, comprising:

• a first vacuum vessel which has an inflow portion and an outflow portion for gas containing hydrocarbon gas;
• a plasma generating means for converting the gas into plasma in said first vacuum vessel;
• a second vacuum vessel which is coupled with said first vacuum vessel so as to allow the gas to flow between said outflow portion of said first vacuum vessel and said second vacuum vessel and has a pressure lower than that of said first vacuum vessel;
• said substrate being provided in said second vacuum vessel;
• a mesh type electrode which is provided upstream of said substrate in a flow path of the gas between said first vacuum vessel and said second vacuum vessel;
• a voltage applying means for applying a voltage to said mesh type electrode;
• and
• a supply means for continuously supplying a clean portion of said mesh type electrode to a front of said substrate.