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AssigneeCanon Kabushiki Kaisha
InventorsTakatomi Miyazaki, Satoshi Osaki
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A flow regulating apparatus for a porous hydrostatic bearing includes a measuring device for measuring a flow of injected gas through a bearing surface of the hydrostatic bearing to be regulated, a pattern member having a plurality of application pattern portions of different opening ratios on each of which a plurality of small holes are formed in a dispersive manner, and an application device for applying solvent on the bearing surface through the pattern member. A proper pattern portion is selected based on a flow measured by the measuring device, and the proper pattern portion and the application device are aligned with a portion of the bearing surface to which the solvent is to be applied. The solvent is then applied and this operation is repeated until the flow measured by the measuring device becomes a predetermined value.
A flow regulating apparatus for a porous hydrostatic bearing, said apparatus comprising:
A flow regulating method for a porous hydrostatic bearing, said method comprising the steps of:
A flow measuring apparatus for a porous hydrostatic bearing comprising:
A flow measuring method for a porous hydrostatic bearing, said method comprising the steps of:
Dependencies are inferred from the claim text.