Working apparatus having working head movable in X-Y directions

A working apparatus, comprising:

• a base;
• a pair of supports provided on said base;
• first and second linear servo-motor means provided on said supports in parallel to each other, said first and second linear servo-motor means including slider means, respectively;
• beam means both ends of which are coupled to said slider means of said first and second linear servo-motor means;
• third linear servo-motor means mounted on said beam means and including a plurality of sliders;
• a plurality of working head means each coupled to one of sid plurality of sliders on said beam means;
• driving means for moving said working head means in said longitudinal direction;
• and
• control means for controlling said first, second and third linear servo-motor means so that said beam is moved in parallel motion by said sliders, and for independently controlling each of said plurality of sliders on said beam means.

A working apparatus, comprising:

• a base;
• a pair of supports provided on said base;
• first and second linear servo-motor means provided on sid supports in parallel to each other, said first and second linear servo-motor means including slider means, respectively;
• beam means both ends of which are coupled to said slider means of said first and second linear servo-motor means;
• a plurality of working head means each coupled to one of said plurality of sliders on said beam means;
• driving means for moving said working head means in said longitudinal direction;
• and
• control means for controlling said first and second linear servo-motor means so that said beam is moved in parallel motion by said sliders wherein said first and second linear servo-motor means includes a plurality of first linear servo-motors and a plurality of second linear servo-motors, respectively, and each of said fist linear servo-motors is paired with its counterpart in said second linear servo-motors so as to constitute a plurality of linear servo-motor pairs, and said beam means includes a plurality of beams each of which is coupled to one of said linear servo-motor pairs.

A working apparatus, comprising:

• a base;
• a pair of supports provided on said base;
• first and second linear servo-motor means provided on said supports in parallel to each other, said first and second linear servo-motor means including slider means, respectively;
• beam means both ends of which are coupled to said slider means of said first and second linear servo-motor means;
• third linear servo motor means mounted on said beam means and including a plurality of sliders;
• a plurality of working head means each coupled to one of sid plurality of sliders on said beam means;
• driving means for moving said working head means in said longitudinal direction;
• and
• control means for controlling said first and second linear servo-motor means so that said beam is moved in parallel motion by said sliders wherein said first and second linear servo-motor means include a plurality of first linear servo-motors and a plurality of second linear servo-motors, respectively, and each of said first linear servo-motors is paired with its counterpart in said second linear servo-motors so as to constitute a plurality of linear servo-motor pairs, and said beam means includes a plurality of beams each of which is coupled to one of said linear servo-motor pairs.

A working apparatus, comprising:

• a base;
• a pair of supports provided on said base;
• first and second linear servo-motor means provided on said supports in parallel to each other, said first and second linear servo-motor means including slider means, respectively;
• beam means both ends of which are coupled to said slider means of said first and second linear servo-motor means;
• a plurality of working head means each coupled to one of said plurality of sliders on said beam means;
• driving means for moving said working head means in said longitudinal direction;
• and
• control means for controlling said first and second linear servo-motor means so that said beam is moved in parallel motion by said sliders wherein said first and second linear servo-motor means include a plurality of first sliders and a plurality of second sliders, respectively, and each of said first sliders is paired with its counterpart in said second sliders so as to constitute a plurality of slider pairs, and said beam means includes a plurality of beams each of which is coupled to one of said slider pairs, and said control means controls said slider pairs independently.