Fluid rotating apparatus
AssigneeMatsushita Electric Industrial Co., Ltd.
InventorsTeruo Maruyama, Tatsuhisa Taguchi, Yoshikazu Abe, Mikio Hasegawa
Life of this patent
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Abstract
A fluid rotating apparatus according to the present invention is designed to promptly achieve an extremely high degree of vacuum from promptly atmospheric pressure promptly by its single apparatus. Moreover, high-speed synchronous rotation of the rotary shafts of the apparatus is controlled by use of a rotary position detecting sensor, to thereby avoid control mechanical contact thereof with a gear or the like. In addition, hydrostatic bearing are employed for supporting the rotary shafts to avoid of mechanical abrasion and the use of lubricant oil.
Claims26
A fluid rotating apparatus comprising
- a housing;
- a plurality of rotors accommodated in said housing in such a manner that said rotors do not come into contact with one another;
- bearings rotatably supporting said rotors;
- a fluid suction port and a fluid discharge port formed in said housing;
- a plurality of motors respectively operably connected to said rotors for driving said rotors, respectively;
- and
- means for detecting rotational angles and numbers of rotations of said motors, and controlling said motors to drive said rotors synchronously on the basis of the rotary angles and the numbers of rotations detected.
A vacuum pump for broad-band use, comprising:
- a housing having a first chamber and a second chamber communicating with the first chamber;
- a first rotary shaft rotatably accommodated in the first chamber;
- a second rotary shaft rotatably accommodated in the second chamber, the first and second rotary shafts being synchronously rotated;
- positive displacement vacuum pump structure sections formed at outer peripheries of the first and second rotary shafts and confronting a portion where the first chamber communicates with the second chamber;
- a kinetic vacuum pump structure section formed at an outer periphery of the first rotary shaft and spaced from the positive displacement vacuum pump structure sections;
- a first suction port formed at a part of the first chamber where the kinetic vacuum pump structure section of the first rotary shaft is formed;
- and
- a discharge port formed at a part of the first chamber where the positive displacement vacuum pump structure section is formed.
Dependencies are inferred from the claim text.