Modular scatterometer with interchangeable scanning heads

An interchangeable scanning head for a modular scatterometer for measuring light scatter from a subject surface and for transmitting light measurements to a base unit for processing, the scanning head comprising:

• one or more light source means for generating a light beam that is incident upon the subject surface;
• one or more detector means for detecting light scattered from the subject surface by the light beam;
• means for storing profile information that describes certain characteristics and parameters associated with the interchangeable scanning head;
• means for detachably connecting the scanning head to the base unit so that the interchangeable scanning head can be replaced with one or more other interchangeable scanning heads having different characteristics and associated parameters;
• and
• control means operably connected with the base unit, the light source means, the detector means, and the means for storing profile information for controlling the operation of the scanning head in response to commands from the base unit and for transmitting commands to and from the base unit and for transmitting measurements of light scattered from the subject surface as detected by the detector means and profile information as stored by the means for storing profile information to the base unit.

A modular scatterometer for measuring light scatter from a subject surface comprising:

• a base unit, including:
• means for supplying electrical power to the scatterometer;
• processor means for controlling operational flow of various functions of the scatterometer and for analyzing light scatter measurement information;
• and
• operator control means for providing control information to the processor means relating to the operational flow of the scatterometer;
• a scanning head detachably and operatively connected to the base unit, the scanning head including:
• one or more light source means for generating a light beam that is incident upon the subject surface;
• one or more detector means for detecting light scattered from the subject surface by the light beam;
• and
• means for storing profile information that describes certain characteristics and parameters associated with the scanning head;
• and
• transmission means operably connected to the base unit and the scanning head for transmitting and receiving both analog and digital signals between the scanning head and the base unit.