Method of forming an optical channel waveguide by gettering
AssigneeThe Charles Stark Draper Laboratory, Inc.
InventorsRichard P. Tumminelli, Farhad Hakimi, John R. Haavisto
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Abstract
A method of forming an optical channel waveguide by gettering includes forming on a substrate a porous waveguide layer containing an index of refraction raising dopant in a compound; sealing a portion of the waveguide layer along a path; and reacting the component, including the index of refraction raising dopant, with a reactant in the unsealed portion of the waveguide layer to form a volatile product from the reactant and dopant to deplete the dopant in the unsealed portion of the waveguide layer and reduce its index of refraction relative to that in the path to produce a channel waveguide along the path.
Claims14
A method of forming an optical channel waveguide by gettering, comprising:
- preparing a compound including an index of refraction raising dopant;
- forming on a substrate a porous waveguide layer including said compound;
- sealing a portion of the waveguide layer along a path;
- and
- reacting the compound including the index of refraction raising dopant with a reactant in the unsealed portion of said waveguide layer to form a volatile product from the reactant and dopant to deplete the dopant in the unsealed portion of the waveguide layer and reduce its index of refraction relative to that in the path to produce a channel waveguide along the path.
Dependencies are inferred from the claim text.