Fiber-optic gyroscope integrated on a silicon substrate
AssigneeStandard Elektrik Lorenz AG
InventorRolf Regener
Life of this patent
Estimating the term…
Abstract
A fiber-optic gyroscope for measuring rotation rates which includes electrical, optical, and electro-optical functional units as well as at least one fiber coil, is constructed so that at least the optical and electro-optical functional units are integrated on a single silicon substrate.
Claims19
In a fiber-optic gyroscope for measuring rotation rates which includes electrical, optical, and electro-optical functional units and at least one fiber coil, the improvement wherein at least the optical and electro-optical functional units are integrated on a silicon substrate.
In a fiber-optic gyroscope, a large-scale-integrated functional unit comprising:
- a silicon substrate;
- at least one light source formed on said substrate;
- at least one detector formed on said substrate;
- at least one optical coupling means formed on said substrate, for coupling said at least one detector and said at least one light source with at least one external fiber coil, ends of said at least one fiber coil being fixedly disposed in grooves in said substrate.
Dependencies are inferred from the claim text.