Charged-particle energy analyzer and mass spectrometer incorporating it
OwnerRobert H. Batemaninventor
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Abstract
An electrostatic analyzer (1) for dispersing a beam of charged particles (10) according to their energy comprises two groups (2, 3) of spaced-apart linear electrodes (4, 8, 9, 20) respectively disposed above and below the charged particle beam. The potentials of the electrodes (4, 8, 9, 20) in each group progressively increase from one to the next, thereby providing an electrostatic field in a central plane (7) between the groups which is capable of deflecting the charged particles along different curved trajectories (11, 12) according to their energies. Various mass spectrometers incorporating such an analyzer are also disclosed.
Claims21
An electrostatic analyzer for dispersing a beam of charged particles according to their energy, said analyzer comprising an upper and a lower group of spaced apart linear electrodes respectively disposed above and below said beam, and means for applying electrical potentials to said electrodes, each said group comprising a pair of electrodes between which one or more central electrodes are disposed, the potential of one electrode of the pair being more positive and the potential of the other electrode of the pair being more negative than the potential at which ions comprised in said beam enter the analyzer, and the potentials of all the electrodes comprising each said group progressively increasing from one electrode to the next, thereby providing in a central plane between said groups of electrodes an electrostatic field which is capable of deflecting said charged particles along different curved trajectories according to their energies.
Dependencies are inferred from the claim text.