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US 5,192,867 AGranted
Electron optical measurement apparatus
AssigneeHitachi, Ltd.
InventorsNobuyuki Osakabe, Junji Endo, Akira Tonomura, Masahiro Tomita, Tadao Furutsu
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AssigneeHitachi, Ltd.
InventorsNobuyuki Osakabe, Junji Endo, Akira Tonomura, Masahiro Tomita, Tadao Furutsu
Estimating the term…
In an electron holography apparatus having an electron source, a specimen holder, an electron lens system, and an electron biprism, the electron biprism is so constructed as to be rotatable about the electron optics axis. The rotation angle about the electron optics axis is commanded by the operator of the electron holography apparatus. A central wire of the electron biprism is allowed to be translated in a direction orthogonal to the electron optics axis, thus permitting the application of the fringe scanning method. The center of an aperture is selectively allowed to be aligned with that of the electron biprism to ensure that the measurement apparatus can be used selectively as either the electron holography apparatus or an electron microscope.
An electron holography apparatus having an electron source, a specimen holder, an electron lens system and electron biprism means, said apparatus comprising means for rotating at least one of a specimen and said electron biprism means about the electron optics axis so as to adjust and maintain a determined directional relationship between a specimen image and said electron biprism means independent of changes of a magnification of the electron lens system.
An electron holography apparatus having an electron source, a specimen holder, an electron lens system and electron biprism means, said apparatus comprising means for translating a central wire of said electron biprism means in a direction orthogonal to the electron optics axis.
An electron holography apparatus having an electron source, a specimen holder, an electron lens system and electron biprism means, said apparatus comprising means for rotating at least one of a specimen and said electron biprism means about the electron optics axis, and means for translating a central wire of said electron biprism means in a direction orthogonal to the electron optics axis.
An electron holography apparatus having an electron source, a specimen holder, an electron lens system, electron biprism means and aperture means, said apparatus comprising means for selectively utilizing one of said electron biprism means and said aperture means so that when said electron biprism means is selected said electron holography apparatus serves as an electron holography apparatus and when said aperture means is selected said electron holography apparatus serves as an electron microscope.
Dependencies are inferred from the claim text.