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US 5,192,395 AGranted
Method of making a digital flexure beam accelerometer
AssigneeTexas Instruments Incorporated
InventorsRobert M. Boysel, Jeffrey B. Sampsell
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Abstract
It is possible to determine acceleration using an array of micro-machined elements. The invention described herein details how to do so by fabricating an array of structures with a substrate, addressing circuitry, a spacer layer forming a well over the addressing circuitry, and a deflection element over the well. The deflection elements are configured so each element is deflected by a higher acceleration. The invention also shows one embodiment of the invention.
Claims8
A process for fabrication of sensor elements comprising the following:
- a) forming a ground plane layer upon a substrate;
- b) fabricating addressing circuitry and electrical contacts upon said ground plane;
- c) spinning a spacer layer upon the entire substrate;
- d) depositing a layer of thin metal upon said spacer layer;
- e) patterning said thin metal layer;
- g) depositing a layer of heavy metal upon said thin metal layer;
- h) patterning and forming said heavy metal layer so each sensor element has a different mass;
- i) dividing said substrate into individual chips;
- and
- j) undercutting said spacer layer.
7 more elements
Dependencies are inferred from the claim text.