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US 5,190,824 AGranted
Electrostatic-erasing abrasion-proof coating
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorKenji Itoh
Life of this patent
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Abstract
An abrasion-proof and static-erasing coating is formed on the contact surface of a contact image sensor. The coating comprises a first film having a high hardness and a low conductivity, a second film formed on the first film and having a low hardness and a high conductivity, and a third film having a high hardness and a high resistivity providing an abrasion-proof insulating external surface.
Claims11
An abrasion-proof amorphous carbon coating formed on a substrate comprising:
- a first carbon layer formed on said substrate by glow discharge CVD method where said substrate is located on an electrode which functions as a cathode:
- a second carbon layer formed on said first carbon layer, said second layer having low resistivity and having a lower degree of hardness than said first layer;
- and
- a third diamond-like carbon layer formed on said second layer having a high degree of hardness and resistivity of 10.sup.10 -10.sup.15 ohm centimeter,
- wherein said first layer functions as an impurity blocking layer and to improve the adhesion of said coating to the substrate, said second layer functions to erase static electricity formed on the coating and to reduce stress caused by said first layer, and said third layer functions as a surface protective layer.
2 more elements
Dependencies are inferred from the claim text.