Heat processing apparatus utilizing a plurality of stacked heater holders

A heat processing apparatus comprising:

• a reactor tube in which objects to be heated are housed;
• a wire-shaped heating unit enclosing the reactor tube;
• support means for supporting the heating unit at plural positions, wherein said support means has a plurality of holders stacked one upon the others and each of said holders has recesses on those two faces thereof which are contacted with faces of its adjacent holders, and wherein when the holders are stacked one upon the others, the recesses of said two adjacent holders form a hole through which the heating unit is passed, and wherein said support means has support members each serving to support a pole of the holders stacked one upon the others, and each of the holders stacked one upon the others in a pole are engaged with their corresponding support member;
• and
• reinforcing means, which includes heat-resistant reinforcing columns each being interposed between the holders and the support member, for reinforcing each of the support members of the support means.