Method and apparatus for detecting a crystallographic axis of a single crystal ingot for "OF" determination
AssigneeShin-Etsu Handotai Co., Ltd.
InventorsHiroyaki Ibe, Seiichi Terashima, Tsumoru Masui
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Abstract
A method and an apparatus for detecting a crystallographic axis of a single crystal ingot based on the X-ray diffractometry, wherein and whereby a crystal habit line of the single crystal ingot is optically detected first, and thereafter making use of the geographical relation of the crystallographic axis to the crystal habit line, the crystallographic axis is detected with improved economy of time and labor and with improved precision, so that the orientation flat (OF) is made in the right place and direction.
Claims2
A method for detecting a crystallographic axis of a single crystal ingot based on X-ray diffractometry characterized by comprising the steps of:
- turning the single crystal ingot about its center line at a first speed;
- optically detecting a crystal habit line;
- stopping the single crystal ingot from turning when a crystal habit line is detected;
- determining the rotational direction which will bring a crystallographic axis into the measurement point of the X-ray system sooner;
- turning the single crystal ingot in the thus determined direction at a second slower speed;
- and detecting the crystallographic axis by means of the X-ray system.
An apparatus for detecting a crystallographic axis of a single crystal ingot based on X-ray diffractometry, comprising;
- a turn means capable of holding and turning the single crystal ingot about the center line thereof at a a first speed and at a second lower speed selectively, and stopping at an arbitrary angular position;
- a crystal habit line detector means for optically detecting a crystal habit line of the single crystal ingot;
- and an X-ray system for detecting a crystallographic axis of the single crystal ingot making use of X-ray diffraction.
Dependencies are inferred from the claim text.