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US 5,184,107 AGranted
Piezoresistive pressure transducer with a conductive elastomeric seal
AssigneeHoneywell Inc.
InventorDean J. Maurer
Life of this patent
Estimating the term…
Abstract
A low cost piezoresistive pressure transducer utilizing premolded elastomeric seals in which at least one seal is electrically conductive. A piezoresistive stress sensitive element in the form of a diaphragm of semiconductor material having a thickened rim is held at its rim between a pair of premolded elastomeric seals in a two piece housing. Electrical connections with external circuitry are made by conductive paths through one of the elastomeric seals which makes contact with electrical leads which pass through the housing wall.
Claims25
A pressure transducer assembly comprising:
- a diaphragm of semiconductor material having a central portion with a stress sensitive device formed thereon electrically conductive regions extending from the stress sensitive device to a peripheral portion of said diaphragm;
- a housing containing said diaphragm and having at least one pressure port which communicates with said diaphragm, and said housing and having first and second opposing internal surfaces configured to form first and second seats for seals on opposite sides of the diaphragm;
- electrical leads which extend from one of the interior to the exterior of the housing are positioned proximate to the first seats;
- and
- first and second elastomeric seals located between said diaphragm and the first and second seats respectively, each of said elastomeric seals being molded in a configuration to extend from the seat on a separate one of the internal surfaces of said housing to a surface of said diaphragm at a location surrounding the central portion thereof, said housing being adapted to hold said first and second seals and said diaphragm between the first and second seats so as to form a pressure tight seal between said housing and said diaphragm on opposite sides thereof, said first elastomeric seal being electrically conductive so as to conduct current from the electrically conductive regions on said diaphragm to the electrical leads.
2 more elements
A pressure transducer assembly comprising:
- a two piece housing in which a first housing piece is configured with a cavity, a second housing piece is configured with an opposing surface which closes the cavity when the first and second piece are assembled as said housing, said housing having at least one pressure port therein which communicates with the cavity;
- electrical leads adapted to conduct current from the interior of the first housing piece to the exterior of the housing;
- a first elastomeric seal with first and second opposing sides between which said seal is adapted to conduct electrical current, said first elastomeric seal being located in the cavity with the first opposing side in a sealed relationship with said housing surrounding the pressure port, said first opposing side being in electrical contact with the electrical leads;
- a diaphragm of semiconductor material with first and second opposing sides having a central portion with a stress sensitive device formed thereon and electrically conductive regions formed on the first side extending from the stress sensitive device to a peripheral portion of said diaphragm being positioned in the cavity of the first housing piece so that the first side contacts the second opposing side of the first seal;
- and
- a second elastomeric seal with first and second opposing sides is positioned in the cavity so that the first opposing side thereof contacts the second side thereof is in a sealed relationship the second housing piece;
3 more elements
A method of producing a pressure transducer assembly comprising the steps of:
- providing a first housing piece in which a cavity is formed and electrical leads are provided to conduct current from a wall of the cavity to the exterior of said housing piece;
- positioning a first elastomeric seal in contact with the electrical leads within the cavity of the first housing piece, said first elastomeric seal having opposing sides and being adapted to conduct current between said opposing sides;
- positioning a stress sensitive device within the cavity adjacent to the first elastomeric seal wherein said stress sensitive device having first and second opposing sides, a central diaphragm portion whereupon a stress sensitive element is formed, and electrically conductive regions formed on the first side which extend from the stress sensitive element to a peripheral portion of said device, so that said conductive regions contact one opposing side of the first elastomeric seal;
- positioning a second elastomeric seal within the cavity adjacent to the stress sensitive device, said second elastomeric seal having opposing sides of which one side contacts the second side of the stress sensitive device;
- providing a second housing piece which is configured with a surface which will close the cavity and contact the side of the second elastomeric seal opposite said stress sensitive device;
- and
- securing the first and second pieces together so that a pressure tight seal is created in the cavity between the first and second elastomeric seals and the stress sensitive device.
4 more elements
A pressure transducer, comprising:
- a pressured sensitive device having a stress sensitive region and an electrically conductive region;
- a housing shaped to receive said pressure sensitive device;
- and
- a first elastomeric seal disposed between a first side of said pressure sensitive device and a first seat formed on a surface of said housing, said first elastomeric seal having an opening formed therein and a selectively conductive region, said selectively conductive region comprising a plurality of conductive layers alternatively arranged with insulative layers, said selectively conductive region being disposes in electrical communication with said electrically conductive region of said pressure sensitive device, said opening being disposed in fluid communication with said stress sensitive region of said pressure sensitive device.
1 more element
Dependencies are inferred from the claim text.