US 5,184,012 A · Optical scanning apparatus with axis deviation correction

Abstract

An optical scanning apparatus comprises a light source, a converging lens for converging a beam emitted by the light source and forming a beam spot on an object, a first optical deflecting system, movably arranged in the optical path and between the light source and the converging lens, for causing the beam spot formed on the object to move in a first direction, a second optical deflecting system, movably arranged in the optical path and between the first optical deflecting system and the converging lens, for causing the beam spot to move in a second direction, and a movable mirror, arranged in the optical path and between the light source and the first optical deflecting system for correcting the deviation of the optical axis due to the movement of the first and second optical deflecting system. At least one of the first and second deflecting means is moved so that a conjugate plane with respect to the pupil of the converging lens is located at a desired portion between the first and second optical deflecting system.

Claims14

Dependent claims

An optical scanning apparatus comprising:

a light source;
a converging lens for converging a beam emitted by said light source and forming a beam spot on an object;
first deflecting means, movably arranged in an optical path and between said light source and said converging lens, for continuously changing an angle of the beam going out therefrom, thereby causing the beam spot formed on the object to move in a first direction;
second deflecting means, movably arranged in the optical path and between said first deflecting means and said converging lens, for continuously changing an angle of the beam going out therefrom thereby causing the beam spot formed on the object to move in a second direction;
and
correcting means, arranged in the optical path and between said light source and said first deflecting means, for correcting deviation of an optical axis due to the movement of said first and second deflecting means,
wherein at least one of said first and second deflecting means is moved so that a conjugate plane with respect to a pupil of said converging lens is located at a desired portion between said first and second deflecting means.

4 more elements

An optical scanning apparatus comprising:

a light source;
a converging lens for converging a beam emitted by said light source and forming a beam spot on an object;
first deflecting means, arranged in an optical path and between said light source and said converging lens, for continuously changing an angle of the beam going out therefrom, thereby causing the beam spot formed on the object to move in a first direction;
and
second deflecting means, arranged in the optical path and between said first deflecting means and said converging lens, for continuously changing an angle of the beam going out therefrom, thereby causing the beam spot formed on the object to move in a second direction;
wherein said first and second deflecting means are positioned so that an average position of conjugate planes with respect to the pupils of a plurality of converging lenses which are exchangeable for said converging lens coincides with a middle point between said first and second deflecting means.

3 more elements

Dependencies are inferred from the claim text.

Optical scanning apparatus with axis deviation correction

Life of this patent

Optical scanning apparatus with axis deviation correction

Life of this patent

Abstract

Claims14