Fabrication of polycrystalline free-standing diamond films
AssigneeFord Motor Company
InventorsTimothy J. Potter, Michael A. Tamor, Ching-Hsong Wu
Life of this patent
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Abstract
Method of fabricating free-standing diamond films by depositing and adhering polycrystalline diamond by hot filament chemical vapor deposition (1-100 Torr, filament temperature equal to or greater than 1900.degree. C., substrate temperature of 650.degree.-950.degree. C.) onto a substrate meltable at a temperature slightly in excess of the deposition temperature; and (b) prior to cooling said polycrystalline diamond particles, increasing (50.degree.-300.degree. C.) the substrate temperature to melt at least a portion thereof while permitting such melt to emigrate from the diamond films.
Claims11
A method of fabricating free-standing diamond films, comprising
- (a) depositing and adhering polycrystalline diamond film by hot filament chemical vapor deposition onto a substrate meltable at a temperature slightly in excess of the deposition temperature;
- and
- (b) prior to cooling said polycrystalline diamond films, increasing the substrate temperature by conductance heating to melt at least a portion thereof while permitting such melt to emigrate from the diamond films.
A method of fabricating free-standing diamond films, comprising:
- (a) depositing and adhering polycrystalline diamond film by hot filament chemical vapor deposition onto a substrate meltable at a temperature slightly in excess of the deposition temperature;
- and
- (b) prior to cooling said polycrystalline diamond films, increasing the substrate temperature by conductance heating to melt at least a portion thereof while permitting such melt to emigrate from the diamond films by use of gravity and tilting of the support for the substrate material.
A method of fabricating free-standing diamond films, comprising:
- (a) depositing and adhering polycrystalline diamond film by hot filament chemical vapor deposition onto a substrate meltable at a temperature slightly in excess of the deposition temperature;
- and
- (b) prior to cooling said polycrystalline diamond films, increasing the substrate temperature by conductance heating to melt at least a portion thereof while permitting such melt to emigrate from the diamond films by use of a screen fabric acting as a support thereof, which screen support absorbs the melt by capillary action during step (b), said screen being constituted of a material having a higher melting temperature than said substrate material.
Dependencies are inferred from the claim text.