Apparatus for placing or storing flat articles in a cassette with intermediate racks
AssigneeCommissariat a l'Energie Atomique
InventorDidier Cruz
Life of this patent
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AssigneeCommissariat a l'Energie Atomique
InventorDidier Cruz
Estimating the term…
An apparatus which makes it possible to store or place flat articles (20) in a storage cassette (18) with the aid of an intermediate cassette (60), so that it is possible to temporarily store in the latter certain flat articles (20). The apparatus includes a gripping device (50) having a number of tracks (2) corresponding to the number of racks of the storage cassette (18). It also includes an intermediate cassette (60), whereof each rack is placed so as to correspond with the tracks (2) of the gripping device. In order to insert or remove a flat article (20) with respect to the storage cassete (18), it is possible to remove certain flat articles (21) from the gripping device (50) which might cause a hindrance during the penetration of the tracks (2) into the storage cassette (18). A pneumatic raising device is responsible for the handling of the flat articles on the tracks (2). Specific application to the handling of silicon wafers used in the manufacture of integrated circuits.
An apparatus for placing or storing flat articles (20) in a storage cassette (18) and which are stored parallel to one another, placed on lateral supports (23) with a predetermined number (N) of racks and separated from one another by a predetermined clearance (E) comprising a gripping means (50,70) having the same number (N) of horizontal tracks (2) separated from one another by the same predetermined clearance (E) and each terminated by a gripping end (6), wherein are positioned means for the gripping and releasing of a flat article (20) with respect to a corresponding rack of the storage cassette (18);
Dependencies are inferred from the claim text.